【摘要】 提出了基于微电子机械系统(MEMS)技术的一种新型的带透明电极的可变形反射镜。给出了透明电极、超薄镜面和驱动电极的制作工艺及其工作特性。静态测试结果表明,带透明电极的可变形反射镜驱动电压低,最大变形量可达19μm,有效反射面积可达200 mm2,能很好地改善整个自适应系统的性能。更多还原

【Abstract】 A novel deformable mirrors is presented with transparent electrode based on micro-electromechanical system(MEMS) technology.The method to design and fabricate the transparent electrode and thinner mirror is proposed as well as their character.The experiment result shows that such a device has 19 μm deflection with small actuating voltages,and the effective reflection area can reach 200 mm~2,so it can improve performance in adaptive optics system.更多还原