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AU/(SI/SIO2)/P-SI薄膜中电流及电致发光机制的分析
Study of Transport and Electroluminescence Mechanism in Au/(Si/SiO2)/p-Si Structure
【摘要】 用射频磁控溅射法制备了具有AU/(SI/SIO2)/P-SI结构的样品,利用I-V特性曲线和电致发光(EL)谱对载流子的输运及复合发光过程进行了研究,用位形坐标理论模型分析的结果表明,在SIO2薄膜中存在2个由于缺陷而形成的发光中心,AU膜中的电子和P型SI中的空穴在较高的电场下以FOWL-ER-NORDHEIM(F-N)隧穿方式进入SIO2薄膜,并通过其中的缺陷中心复合而发光。
【Abstract】 The samples with Au/(Si/SiO2)/p-Si structures were fabricated using the R.F magnetron sputtering technique.And their carrier transport and electroluminescence mechanism were studied by the I-V curve and EL spectra.Using the configuration coordinate as a theoretical model,the results indicate that there are two defect center in SiO2 films,the electron in Au and the hole in p-Si enter into SiO2 film with the Fowler-Nordheim(F-N) tunneling model at a high bias voltage and recombine through these defect centers in SiO2 film.
【Key words】 R.F magnetron sputtering; Fowler-Nordheim(F-N) tunneling; configuration coordinate;
- 【文献出处】 光电子·激光 ,Journal of Optoelectronics.laser , 编辑部邮箱 ,2006年02期
- 【分类号】O472.3
- 【被引频次】1
- 【下载频次】93