【摘要】 研制了一套应用于可见光波段(中心波长632.8 nm)的二元光学谐衍/折混合光学系统。设计要求为:焦距120 mm,入瞳孔径60 mm,F/#数为2,波面峰谷值(P-V)在λ/10以下。因为加工误差等因素,其P-V测得约λ/5,但已满足Strehl判据(<λ/4),结果验证了二元光学元件(BOEs)在可见光波段应用的可行性。系统中,二元面采用8台阶3次套刻,掩模最小线宽为102μm。根据测试结果,提出了改进现有系统缺陷的方向和措施。更多还原

【Abstract】 A binary harmonic diffractive/refractive hybrid optical system used in the visible spectrum(λ=632.8 nm) is fabricated for an interferometer.The design parameters are as below:f=120 mm,F/#=2,diameter of entrance pupil=60 mm.The system aims at reducing the P-V value(peak-to-valley value of a wavefront) to less than λ/10.The wave aberration of the system is analyzed,and the performance of the system is also tested in an interferometer.The actual PV value is about λ/5,however,it satisfies the Strehl criterion(<λ/4).The testing result proves the practicability of applying binary optical elements(BOEs) in the visible spectrum.An 8 step binary surface is fabricated and the minimum line-width of the masks is 102 μm.In the end,according to the defects of the hybrid optical system,some improvements are suggested.更多还原