【摘要】 用MOCVD法在蓝宝石衬底上得到了ZnO(0002)膜,并用XRD和SEM进行了表征.结果表明,薄膜中沿[0001]择优取向生长的柱状晶垂直于衬底表面,晶柱之间存在着边界和间隙.X射线Ф扫描实验结果表明,晶柱之间的取向偏差在3°~30°之间.X射线ω摇摆曲线和谱线宽度分析结果表明,薄膜中的晶柱是由多个晶粒堆叠而成,且晶粒之间的平均取向偏差也在2.6°以上.实验结果表明,ZnO大失配度异质外延膜是c轴[0001]取向柱状多晶体,ZnO薄膜的结晶不完整性主要是由其柱状晶结构造成的.更多还原

【Abstract】 ZnO(0002) films were grown on sapphire(0006) substrate by metal-organic chemical vapor deposition(MOCVD) and were characterized by X ray diffraction(XRD) and scanning electronic microscope(SEM).SEM and XRD results show that the columnar crystals grew along c-axis and were vertical to the(0006) plane of the substrate.There exist grain boundaries and grain interstitials among the crystals.The Ф scanning curves of the(10-13) plane for ZnO films show that the mis-orientation among columnar crystals ranged from 3° to 30°.The full wide at half maximum(FWHM) of rocking curves of(0002) plane for the ZnO films is above 2.6°.Grain sizes at different thicknesses illustrate that the column is composed of the grains with different sizes.The big mismatch heteroepilayer ZnO films are columnar poly-crystals orienting along c(axis).更多还原