【摘要】 提出了一套对椭偏仪的测量误差进行有效修正的方案,设计了一个Windows版的椭偏仪测厚数据处理软件,并在该软件中嵌入了对测量数据的误差进行修正的方法,使椭偏仪的最终测量结果更加精确。制作了30片厚度梯度分布的标准样片(厚度20nm~1μm),用于从“软”、“硬”件两个方面对椭偏仪进行误差修正,使最终的误差小于1%。本文所提出的修正方案具有一定的普适性、实用性。更多还原

【Abstract】 An effective scheme for correcting the error of ellipsometer was worked out. And a Windows-version software for processing the data of ellipsometer was designed, in which a method of error correcting for the data measured by ellipsometer was embedded to make the final result more accurate.30 thickness-grads-distributing samples (thickness from 20 nm to 1 μm)were prepared to correct the error both by hardware and software. And the final errors are less than 1%. The scheme given in this paper is practical and can be widely used.更多还原