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掺Er3+:Al2O3平面光波导的溶胶—凝胶制备

Sol-gel preparation of Er3+ doped Al2O3 planar optical waveguide

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【作者】 熊涛刘永智戴基智杨长生

【Author】 XIONG Tao1,LIU Yong-zhi1,DAI Ji-zhi1,YANG Chang-sheng2 (1. College of Opto-electronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China; 2. Institute of Micro Electronics and Solid Electronics, University of Electronic Science and Technology of China, Chengdu 610054, China )

【机构】 电子科技大学光电信息学院电子科技大学微电子与固体电子学院 四川成都610054四川成都610054

【摘要】 掺铒光波导主要用来制作光波导放大器。采用溶胶-凝胶法制备了透明、稳定的掺铒的铝硅酸盐玻璃溶胶;使用浸渍提拉法或旋转涂敷法,并通过放在乙醇蒸汽中干燥,可在玻璃表面得到均匀的凝胶膜;最后样品在一定温度下烧结;通过多次重复涂敷-烧结这一工艺流程可以形成厚的硅酸盐玻璃膜层并得到波导结构。使用显微镜研究了凝胶膜表面性质,通过棱镜耦合法测量了波导的有效折射率Nm,也测定了所制备波导的吸收光谱。溶胶-凝胶法在制作均匀性好、高掺铒浓度的铝硅酸盐玻璃光波导上具有优势。

【Abstract】 Erbium-doped optical waveguide is used to fabricate optical waveguide amplifiers. Stable and transparent Er3+ doped aluminosilicate glass sol was prepared by the sol-gel route. Then the gel film can be prepared by dip-coating or spin-coating technique on the surface of glass and followed by drying in the ethanol vapor. Thick layers of silicate glass can be formed by repetitively using this technique. Waveguide structures can be fabricated by sintering the sample at certain temperature. Microscope was employed to investigate the surface characteristics of the gel films. Its effective refractive indexes Nm were detected by coupled prism method. The absorption spectra of waveguide were measured. The sol-gel approach has advantages in forming high uniformity and high concentration erbium-doped aluminosilicate glass optical waveguide.

  • 【文献出处】 光电工程 ,Opto-Electronic Engineering , 编辑部邮箱 ,2006年06期
  • 【分类号】TN252
  • 【被引频次】2
  • 【下载频次】100
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