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非整数倍双频光栅投影的相位测量轮廓术

Profilometry for phase measurement with non-integral twin-frequency grating

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【作者】 陈永权曹益平常山

【Author】 CHEN Yong-quan,CAO Yi-ping,CHANG Shan(Department of Opto-electronics, Sichuan University, Chengdu 610064, China)

【机构】 四川大学光电系四川大学光电系 四川成都610064四川成都610064

【摘要】 采用整数倍双频光栅投影的借助低频相位导向的双相位图成整数比例相位展开方法不可避免误差积累传递,由此提出了一种采用非整数倍双频光栅投影的新光学三维传感方法。非整数倍双频光栅条纹投影到物体上,两相位同时分别以特定相位间隔增长,CCD依次获取16帧变形条纹图,通过这16帧条纹图的强度,可有效地分离出两组受物体调制的对应频率变形条纹的截断相位。利用两组截断相位关系,进行绝对相位展开,避免相位展开中误差的传递,较好地重建了被测物体的轮廓。计算机模拟试验结果证实,该方法与采用整数倍双频光栅投影相比,测量高度为105mm的同一不规则物体时,标准偏差由0.821mm降低到0.760mm。

【Abstract】 Due to integral proportional two-phase-unwrapping method which adopts integraltwin-frequency grating and low-frequency guide will result in error transfer, a novel optical 3-D sensingmethod using non-integral twin-frequency grating is proposed. The non-integral twin-frequency gratingpatterns are projected onto the object to be measured, and the two phases increases at a regular intervalssimultaneity. Sixteen frames of deformed patterns can be taken by the CCD system. Based on patternintensity, two groups of corresponding discrete phases modulated by the object can be separatedefficiently and calculated accurately. From the relationship between two groups of discrete phases, theabsolute phase-unwrapping method is developed successfully, by which error transfer can be eliminatedand the profile of the object to be measured can be reconstructed accurately. Computer simulation showsthat standard deviation drops from 0.821mm to 0.760mm comparing with integral twin-frequencygrating in measuring an identical irregular object 105mm high.

【基金】 四川省科技攻关项目资助(02GG010-010)。
  • 【文献出处】 光电工程 ,Opto-Electronic Engineering , 编辑部邮箱 ,2006年01期
  • 【分类号】TN253
  • 【被引频次】5
  • 【下载频次】276
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