【摘要】 针对MEMS器件及系统本身的特点和设计方式,构建了MEMS CAD软件系统的结构,并描述了系统中各模块的功能。对当前MEMS CAD系统亟待解决的关键技术,如数值计算方法、多能量域耦合仿真、宏模型建立、版图综合、工艺自动生成和优化以及多领域专家协同设计等问题进行了详细的论述,指出了各项技术的研究进展和发展方向。更多还原

【Abstract】 In order to support the design of MEMS devices and systems,the architecture of MEMS CAD system is constructed and the modules of the system are described.Some key technologies,such as numerical algorithms,coupled-domain simulation,macromodeling method,layout synthesis,automatic generation and optimization of fabrication processes and collaborative design of experts from different domains and places,are discussed.The current state and research trend of each problem are also given.更多还原