【摘要】 为了适应半导体生产工艺发展的要求,我们开发了一种利用改进的Rymaszewski法进行四探针硅片电阻率测量的单片机电路。它主要包括恒流源和电压测量电路两部分。它不仅可以显示恒流源电流以便在其发生变化时进行调整,而且可以方便地实现四根探针分别经过四次轮换供给电流和测量电压,进而提高测量结果的精确性。更多还原

【Abstract】 To adapt demands of the advance for semiconductor production technology,a kind of microcontroller circuit to measure the resistance of wafers was exploited by an improved Rymaszewski Method of four-point probe.It mainly includes two parts.One part is the constant current source,the other part is the circuit to measure the voltages.It can show values of the constant current source so as to adjust it when changed,and realize to provide currents and measure voltages for the four-point probe in their four turns expediently,so the accuracy of the measurement is improved.更多还原