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无酸水热法制备多孔硅
Preparation of Porous Silicon by Non-Acid Hydrot hermal Method
【摘要】 报道一种在无酸性腐蚀液的条件下用反应釜制备多孔硅的新方法。实验采用扫描电镜、拉曼光谱和光致发光谱对样品表面形貌、结构及发光性能进行表征,并与用常规电化学阳极氧化法制出的多孔硅进行了对比研究,研究结果表明用无酸水热法制出的多孔硅表面平整,孔的形状规则,发光效能提高更多。
【Abstract】 This article has reported a new method to prepare porou s silicon by using raction kettle without corrosive acid. SEM, Raman and PL spec trum were adopted to characterize the surface , structure and photoluminescence property of samples. In comparison with those prepared by anodising p type silic on, the porous silicons prepared by non-acid hydrothermal method have smooth su rface , regular shape of pores , and higher PL efficiencey.
【关键词】 光电集成;
多孔硅;
无酸水热法;
电化学阳极氧化法;
【Key words】 photoelectricity integration; porous silicon(PS); non -acid hydrothermal method; anodization;
【Key words】 photoelectricity integration; porous silicon(PS); non -acid hydrothermal method; anodization;
- 【文献出处】 电子器件 ,Chinese Journal of Electron Devices , 编辑部邮箱 ,2006年02期
- 【分类号】TN304.05
- 【被引频次】4
- 【下载频次】235