【摘要】 采用改进的sol-gel法在Pt/Ti/SiO2/Si衬底上制备PZT/PT复合薄膜(共10层),PT的层数分别为2,4,6和8层。结果表明,600℃热处理的PZT/PT复合薄膜为钙钛矿结构,无第二相。随着PT厚度的增加,εr变小,100kHz时为313～228。tgδ在频率低于100kHz时,不随PT厚度变化,为0.015左右;频率为100kHz～1MHz时,PZT6/PT4tgδ最大,1MHz时仍小于0.06。更多还原

【Abstract】 The PbZr0.5Ti0.5O3/PbTiO3 multilayer thin films were prepared on Pt/Ti/SiO2/Si substrate by sol-gel.The 10-layer thin film contained 2,4,6 and 8 PT layers of the 4 samples.The results show that the multilayer PZT/PT films has pure perovskite phase when the films are annealed at 600℃.As the thickness of PT increases,εr of the film is decreased from 313 to 228 at 100 kHz.When the frequency is less than 100 kHz,tgδ is around 0.015.And tgδ of PZT6/PT4 is higher than others when the frequency is between 100 kHz and 1 MHz,but still less than 0.06.更多还原