【摘要】 微光电子机械系统(MOEMS)已经在业界受到研究人员和相关人士的极大关注。文章介绍了MOEMS器件,主要就其制作工艺和封装技术做了讨论。其中,文章着重详细介绍了微光电子机械系统器件的封装工艺和相关技术。更多还原

【Abstract】 Micro-optical -electro-mechanical-system(MOEMS)have received a great of interest and attention from research labs and from the industry. This paper proposes MOEMS devices, make process and packaging technology. And the packaging technology is introduced completely.更多还原