【摘要】 文章介绍了RF MEMS的基本概念、基本特征与关键工艺技术。文章在介绍了RF-MEMS 元器件的基础上,对RF MEMS与MMIC进行了比较,分析了RF MEMS需解决的重点问题。最后对 RF MEMS的发展前景进行了展望。更多还原

【Abstract】 Basic concept , feature and key process of RF MEMS are introduced in this paper, and RF MEMS are compared with MMIC based on devices .Then, the key problems of RF MEMS to be solved are analyzed and the development of RF MEMS is prospected.更多还原