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金属薄膜制备及物性测量系列实验
A group of experiments of metal film preparation and physical property measurement
【摘要】 介绍了由模拟真空实验和“金属薄膜的制备”、“金属薄膜厚度的测量”、“金属薄膜电阻率的测量”,以及“金属薄膜生长过程的动态监测”等4个实验组成的金属薄膜制备与物性测量系列实验.这组实验与现代科学技术发展联系紧密,仪器设备可靠,操作简单,适合于普通物理实验阶段的研究性教学.
【Abstract】 A group of experiments of metal film preparation and physical property measurement,consisting of vacuum experiment,metal film preparation,film thickness measurement,film resistivity measurement and film resistance dynamic measurement experiments,were developed to attempt rearch based teaching in the general physical experiment course.These experiments have close relationship with modern science and technology.The equipments are reliable and easy to be operated,suitable to rearch based teaching in the general physical experiment course.
【关键词】 金属薄膜;
普通物理实验;
研究性教学;
【Key words】 metal film; general physical experiment; rearch based teaching;
【Key words】 metal film; general physical experiment; rearch based teaching;
【基金】 国家工科物理基础课程教学基地项目;北京科技大学教研基金资助项目
- 【文献出处】 大学物理 ,College Physics , 编辑部邮箱 ,2006年05期
- 【分类号】O4-33
- 【被引频次】16
- 【下载频次】951