【摘要】 X射线掠入射显微镜的反射率除了与掠入射角有关之外,还与反射表面的粗糙度密切相关.以设计的非共轴掠入射KBA X射线显微镜系统为例,讨论了掠入射下X射线从金属表面和单层膜表面反射的两种情况.分析了波长为0.83 nm时,表面均方粗糙度(RM S)对反射率的影响,并计算了该系统的X射线反射率.分析结果表明RM S增大,反射率会降低;无氧铜的反射率为0.021,单层膜的反射率为0.049,因此KBA X射线显微镜可采用镀单层膜的方法加工.更多还原

【Abstract】 The reflectivity of X-ray grazing incident microscope is not only relevant to grazing incident angle,but also to surface roughness.Taking the non-coaxial grazing incident KBA X-ray microscope designed as an example,X-ray reflecting from metal surface and single film layer is discussed.At a wavelength of 0.83 nm,the influence of the surface root-mean-square roughness(RMS) on reflectivity is analyzed,and X-ray reflectivity of this system is calculated.The results show that reflectivity decreases with the increasing of RMS.Reflectivity of Cu is 0.021 and that of single film layer is 0.049,thus KBA X-ray microscope is made of single film layer.更多还原