【摘要】 RFMEMS是射频表面微机械系统简称。射频表面微机械系统现在包括滤波器和微型电器元件,如开关,微可变电容和微可变电感。射频开关按驱动原理分有静电,压电,电磁以及热驱动。由于这一研究的高频化和高精度的特点,目前开关的研究集中在静电驱动的方式的研究上,从上市的产品来看,静电驱动是最有希望的RFMEMS的执行机构。静电执行器驱动的RFMEMS开关成为下一代高频通讯中的关键部件。更多还原

【Abstract】 RF MEMS filters, such as FBar SAW and BAW, are well known and have been transitioned into many defense and commercial applications. On the other hand, RF MEMS Switches, Variable Capacitors and Inductances have not been configured into mobile communication systems up to now. In this paper, those are introduced that the novel development on electrostatic actuators droved RF MEMS Switches in Japan. A variable gap droved by electrostatic actuators is a key device for the RF MEMS Switches, Variable Capacitors and Inductances.更多还原