【摘要】 利用等离子体辅助电弧沉积技术制备了不同成分的TiAlSiN多元薄膜,并研究了Si含量对薄膜组织结构、显微硬度和耐磨性的影响。XRD物相分析表明:薄膜主要由AlN和TiN组成。随着膜层中Si含量的增加,薄膜的结构由明显的柱状晶转变为致密的玻璃态结构,显微硬度逐渐提高,耐磨性能得到明显改善。更多还原

【Abstract】 TiAlSiN films with different Si content were prepared with arc ion plating. The influences of Si content on microhardness, microstructure and wear resistance were studied. The XRD analysis shows that the film is composed of TiN and AlN. With the Si content increasing, the microstructure changes from obvious prismatic to compact glassy state, the microhardness of the film increases gradually and the wear resistance of TiAlSiN improves remarkably.更多还原