【摘要】 采用热重-差热(TG-DTA)与气-质联用(GC-MS)研究了CVD技术制备钯膜材料的前驱体乙酰丙酮钯[Pd(acac)2]的热分解行为。通过对比其在空气和氩气两种气氛、不同温度下的热裂解产物,认为在以乙酰丙酮钯为前驱体通过CVD技术制备钯膜时,空气比氩气更适合做载气。更多还原

【Abstract】 The palladium(II) acetylacetonate is an ideal precursor in preparing palladium films or coatings by chemical vapor deposition (CVD). Its thermal behavior has been investigated with TG-DTA and GC-MS under air and argon atmosphere. The results show that palladium(II) acetylacetonate sublime at 187℃ in air and 201℃ in Ar, and then decompose and recombine at higher temperature, forming different organic species, mainly 2,4-pentanedione in air and 2,4-pentanedione, 1-propen-2-ol acetate in Ar. By analysis above, it is suggested that air should be a better gas carrier than argon in the process of preparing palladium films by CVD with Pd(acac)2 as a precursor.更多还原