【摘要】 本文针对重掺硼直拉单晶硅片中流动图形缺陷(FPDs)的显示进行了一系列实验,得到了一种能够腐蚀出重掺硼硅片中FPDs的Secco腐蚀液配方以及清晰显示出FPDs的最佳腐蚀时间。此外,本文就FPD的显示机理进行了探讨。更多还原

【Abstract】 Through a series of experiments performed on the delineation of flow pattern defects(FPDs) in heavily Boron-doped Czochralski(CZ) silicon wafer,a modified Secco Etchant was obtained and the appropriate etching time was defined.Moreover,the mechanism for the delineation of FPDs in CZ silicon wafer was discussed.更多还原