【摘要】 综述了透明导电氧化物(TCO)薄膜的结构、光电性能以及TCO薄膜制备技术的研究进展。ITO薄膜性能优异,是重要的平面显示器件用材料。掺铝ZnO薄膜价格低廉,是极具开发前景的ITO薄膜的替代材料。柔性衬底氧化物半导体透明导电薄膜的开发和应用将扩大TCO薄膜的应用领域。更多还原

【Abstract】 Progresses in research on microstructure, electrical and optical properties and preparation technology of TCO thin films are reviewed. ITO is widely used as transparent conducting film in flat panel display applications because it possesses excellent optical and electrical properties. ZnO∶Al transparent conductive films are with low cost and candidate materials of solar cell instead of ITO. The research and development of TCO films (including ITO films and AZO) prepared on flexible substrate will expand more applications.更多还原