【摘要】 薄膜体声波谐振器及滤波器具有工作频率高、工艺简单、尺寸小、易于集成等优点,成为目前应用于高频通信前置滤波器的首选。系统介绍了用于薄膜体声波谐振器的几种主要材料(AlN、ZnO、PZT)的具体特点、制备工艺及薄膜体声波谐振器与滤波器的结构、设计及其应用。更多还原

【Abstract】 Film bulk acoustic resonators (FBAR) and BAW filters have many advantages, such as high operation frequency, being small in size and easy for fabrication and integration, and so on. It becomes fit for modern communication applications. The properties and fabrications of some major materials for FBAR such as AlN, ZnO, PZT are introduced systematically, and the structures, devices design and applications of BAW filters are discussed as well.更多还原