【摘要】 针对传统红外光源需要另加调制部件,使得传感体系价高和笨重的不足,利用微电子工艺研制了一种用于便携式非扩散红外气体传感器的电调制红外光源,并对其辐射特性进行了测试。将光源应用于自行搭建的小型红外吸收气体传感系统中,对不同气体体积分数的CO2和SO2气体进行探测,测量精度分别达到20×10-6和50×10-6气体体积分数。重复测量偏差在10%之内,且光源辐射性能稳定,可用于多组分气体探测。更多还原

【Abstract】 An electrically modulated infrared source typically used in non-dispersive infrared gas sensor is designed by micromachining technologies to replace the traditional infrared sources where modulating components is required,which made the infrared detecting system both expensive and unwieldy.The source is applied in the portable intrared gas sensor to detect different volume fraction of CO₂ and SO₂ gases, and precision is 20×10^-6 and 50×10^-6 respectively,also repeatability less than 10 %.The source could be applied to multi-gas detection development.更多还原