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基于Si₃N₄薄膜的压力传感器

Pressure sensor based on Si₃N₄ membrane

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【Author】 WANG Qi~(1,2),ZHAO Zhan~1,GENG Zhao-xin~(1,2),FANG Zhen~(1,2),ZENG Huan-huan~(1,2),ZHANG Bo-jun~1(1.State key laboratory of transducer technology,Institute of electronics Chinese Academy of Sciences,Beijing 100080,China;2.Graduate School,Chinese Academy of Sciences,Beijing 100039,China)

【机构】中国科学院电子学研究所传感技术国家重点实验室；中国科学院电子学研究所传感技术国家重点实验室北京100080；中国科学院研究生院；北京100039；北京100080；

【摘要】采用微机电系统(MEMS)技术制造的传感器具有体积小、重量轻、成本低等特点。基于S i3N4压力敏感膜,利用MEMS技术,设计了一种用于测量气压的传感器。采用应变电阻原理对压力进行测量,进行了理论分析计算,设计了工艺过程,制作出了器件样片。这种压力传感器的显著优点是结构简单、工艺过程容易。并且,在50~100 kPa的压力条件下,对传感器进行了测试,其精度达到了0.5%。更多还原

【Abstract】 Sensors based on microelectromechanial system（MEMS） technology have the advantages of small size,less weight and low cost.A pressure sensor based on Si₃N₄ pressure sensitive membrane with MEMS technology is designed.Strain gauge is used to measure the pressure.The characteristics of the sensor are calculated and simulated,process is designed,and a sample sensor is made out.The remarkable advantages of the sensors are simple structure and easy process.The sensor is tested under the condition of 50～100 kPa,and its precision is 0.5 %.更多还原