【摘要】 使用CCD(电荷耦合器)进行光学镀膜宽光谱监控过程中,监测信号受外界杂散光干扰、真空室内背景辐射等因数影响,信噪比低难于准确监控。本文通过对系统前端光路改造以及后期数据数字滤波处理,达到信号压噪目的,使系统在宽光谱膜厚监控过程中具有稳定性好、精度较高、响应速度快等优点.更多还原

【Abstract】 In the monitoring procedure of optical coating with wideband spectrum based on CCD(Charge Couple Device),the signal-to-noise ratio of monitoring signal is too low to accurately monitoring because it is interfered by the factors of stray light,background radiation in vacuum chamber,etc.By rebuilding the beam path of the system and processing the data by digital filter,noise is depressed so that the system of monitoring optical film thickness with wideband spectrum is more stable,more accurate and response faster.更多还原