【摘要】 针对电容式MEMS器件,设计了一种用来检测微小差分电容的电路,该电路主要有方波信号发生器、相敏解调和低通滤波电路等组成.具有抗干扰性能好、电路简单、易于集成的特点.通过主要器件———运放的合理选择,调试出较理想的结果.经实验验证,其分辨率可达10-16F.更多还原

【Abstract】 A circuit to detect the micro-differential capacitance was designed,which can be successfully applied in the capacitive MEMS devices.The circuit mainly was composed of a generator circuit of rectangle wave,phase sensitive demodulation and low pass filter circuit.This circuit was simply and easy to integrate,it has a good anti-disturbed ability,the main component is amplifier,through the choice of the amplifier,can get the ideality wave.Experiment results shown it precision can reach 10-16F.更多还原