【摘要】 介绍了电容式微加工超声传感器(cMUT)的基本结构和工作原理.同时使用有限元方法对cMUT的运行情况进行模拟.提出了两个ANSYS模型来阐述cMUT的塌陷电压与谐振频率.一个3D模型用来阐述制造过程中的残余应力对cMUT谐振频率的影响.另外一个3D模型阐述不同的运行环境对cMUT的谐振频率的影响.更多还原

【Abstract】 The basic structure and operating principle of capacitive microfabricated ultrasonic transducer is reported.At the same time the operation of cMUT is investigated.Two ANSYS models have been developed to illustrate the collapse voltage and resonant frequency of cMUT.A 3D model is used to illustrated the change of resonant frequency resulting from the residual stress which is introduced in the manufacture process.The other 3D model is used to illustrated the change of resonant frequency resulting from the medium in which the cMUT operates.更多还原