【摘要】 在研究双电容接口式微机械陀螺结构与分析传统差分电容检测方法对其驱动力的影响的基础上,提出了一种适合于该陀螺的新型信号检测方法,此方法具有两个显著特点:第一,能够使公共电容极板偏置到零电压,消除其对驱动力的影响,进而提高微机械陀螺的系统灵敏度;第二,能够消除直流电压的不匹配以及失调电压对输出信号的影响.最后,通过HSPICE软件仿真验证了该方法的可行性.更多还原

【Abstract】 The structure of the double capacitive output micromachined gyroscope is investigated. The limitation of the traditional signal detecting methods for such gyroscope is analyzed. Based on these, a novel signal detecting method is presented. It enables the common node of the two groups of capacitors to connect to the zero voltage, so that the restriction of the driving force is eliminated and the sensitivity of the gyroscope is increased. This method also supports cancellation of DC voltage mismatch and offset voltage. This method is confirmed by the HSPICE simulation.更多还原