【摘要】 在分析了微机械陀螺机械耦合误差产生原因的基础上,提出了一种解耦梁方案,可以从结构上消除振动式微机械陀螺敏感模态对驱动模态的耦合影响;基于该解耦梁方案设计了一种新型的Z轴微机械陀螺结构.分析表明,该陀螺结构消除了敏感模态对驱动模态的耦合影响,实现了解耦设计的目的.更多还原

【Abstract】 This paper reports a bulk decoupled Z-axis micro-machined gyroscope. 16 decouple beams has been used to decouple drive and sense oscillation modes.That design prevents unstable operation due to mechanical coupling. The coupling of modes has been taken off according to both simulation results in ANSYS and MEMS Garden.更多还原