【摘要】 为了避免微加速度计在工作过程中因为共振导致结构损坏,需要在结构中合理设计阻尼.设计了一个复合量程压阻式微加速度计,为了使结构中各个传感器具有较好的阻尼参数,通过静电键合在硅结构层下制作一玻璃层.根据Reynolds方程,可知当硅-玻璃静电键合间距d=2.25μm时,复合量程微加速度计中各个传感器可得到较好的阻尼比.更多还原

【Abstract】 To reduce the probable damage caused by resonance in micro accelerometers,an adaptative method is of advantage in damping design. A multi-ranged piezoresistive micro accelerometer is designed, to achieve a reasonable damping ratio of this sensor so as to obtain a preferable amplitude-frequency characteristic and phase-frequency characteristic, an anodic bonding technology is adopted to fabricate a glass-cap below of the mass. The distance between the bottom of mass and the top of the glass-cap is calculated as 5.22 μm, according to the Reynolds function.更多还原