【摘要】 采用氧化、光刻、腐蚀、键合等MEMS技术,研制了一种硅基压电式双向无阀微泵,泵的外形尺寸为30×14×3mm3,泵腔体体积约10mm3.通过大量试验测试,得到了泵压、流量与工作频率、波形、电压幅值之间的关系.当工作电压为110V、频率为40Hz时,微泵的正向最大泵压为120mm水柱,频率为50-90Hz时,最大流量70μl/min;当频率为35Hz时,微泵的反向最大泵压为70mm水柱,最大流量56μl/min.更多还原

【Abstract】 Adopting the MEMS technique, such as the oxidation, lithography, etching and bonding etc, a new bi-directional valveless piezoelectric micropump on the silicon was researched. The whole external size is 30 mm×14 mm×3mm, the pump chamber volume is about 10 mm³. Through the experiments testing, the relationship between the pump pressure, flow rate and working frequency, driving waveform and voltage peak value are analysed. When the working voltage is 110V, frequency is 40 Hz, the micropump could generate the maximum pump pressure of 120 mm H₂O for forward direction, and the maximum flow rate could be the 70 μL/min at the 50-90 Hz frequency. when the frequency is 35 Hz, this micropump could generate the maximum pump pressure of 70mm H₂O for backward direction, and the maximum flow rate could be the 56μL/min.更多还原