【摘要】 电容式RFMEMS开关介质层电荷累积被认为是导致开关失效的主要原因.基于电容式RFMEMS开关工作过程中电场强度的变化,分析讨论了累积电荷的来源,并推导出相应的计算公式.对于随机性较大的界面极化问题,根据理论计算公式,提出从工艺上减小极化现象发生的解决方案.在讨论影响介质层电荷注入各种因素及相互之间关系的基础上,建立了基于电荷累积的开关寿命预测模型.更多还原

【Abstract】 Charge accumulation in dielectric layer is considered as the main reason bringing on failure of capacitive RF MEMS switches. Based on the analysis of the variation of electric-field intensity in the full working process of capacitive RF MEMS switche, the resource of accumulated charge is discussed and the calculating method is deduced. According to the numerical calculated formulas, some conclusions are presented to decrease the polarization phenomena in the fabrication process. A more comprehensive charge accumulation model is built, which can predict the lifetime of capacitive RF MEMS switches.更多还原