【摘要】 研究了基于MOEMS技术的微型可编程光栅的光学特性.对平行复色光正入射时微型可编程光栅的衍射场进行了理论分析,分析表明可以通过对可编程光栅编程状态的预先设定,使其衍射输出对应于不同目标物质的光谱,即模拟光谱.最后介绍了微型可编程光栅的光谱模拟特性在相关光谱检测法中的应用,分析了其相对于传统方法的优点.更多还原

【Abstract】 The optical characteristic of micro programmable grating is investigated. When an incident light is collimated from vertical direction, the diffractive field of programmable grating is analyzed. It is shown that the state of the micro programmable grating can be prescribed and the diffractive emergent light will correspond to spectra of target substance, i.e. synthetic spectra. Finally, the application of the micro programmable grating in correlation spectroscopy and its advantages in comparison with the traditional approach are introduced.更多还原