节点文献
聚酰亚胺悬臂MOEMS电磁光开关的优化设计
Optimized Design for a PI-Cantilever Electromagnetic Actuation MOEMS Optical Switch
【摘要】 利用聚酰亚胺(PI)优良的机械、绝缘、耐热等性能,设计出基于PI膜的磁控光开关.给出合理的线圈宽度与间隙宽度,提出了八边形的线圈绕组结构,计算得出PI膜悬臂梁光开关驱动电压与工作距离的关系,并对悬臂梁长度、宽度、厚度进行优化.在驱动电压为2V时,自由端位移达到2mm.
【Abstract】 A kind of electromagnetic actuation optical switch is designed based on the high performance of polyimide (PI) in mechanical character, insulation and heat-resistant . We analyzed the winding configuration and chose the regular octagon form and also studied the relationship between the driving voltage and working distance about the PI-cantilever, which aimed at optimizing the structure of the PI-cantilever in length, width and thickness. At a driving voltage of 2V, the movable part got a displacement of 2 mm.
【关键词】 光开关;
电磁驱动;
悬臂梁;
聚酰亚胺;
【Key words】 optical switch; electromagnetic actuation; cantilever; polyimide;
【Key words】 optical switch; electromagnetic actuation; cantilever; polyimide;
【基金】 国家自然科学基金资助(60578036);中科院"优秀博士学位论文、院长奖获得者科研启动专项资金"资助
- 【文献出处】 传感技术学报 ,Chinese Journal of Sensors and Actuators , 编辑部邮箱 ,2006年05期
- 【分类号】TN253
- 【被引频次】1
- 【下载频次】123