【摘要】 薄膜沿厚度方向的平均应力梯度及薄膜的弹性模量对器件性能有重要影响.提出了一种利用静电作用下悬臂梁的吸合电压提取薄膜沿厚度方向的平均应力梯度及等效弹性模量的方法,该方法的关键在于实现悬臂梁吸合电压的快速精确计算.考虑了悬臂梁由应力梯度引起的沿宽度方向的弯曲及实现其固定端接近理想固支的方法,提高了吸合电压的计算精度.实际模拟表明该测量方法计算速度快、精度高,能够应用于实际工艺过程中材料参数的在线测量.更多还原

【Abstract】 The stress gradient along the thickness and the elastic modulus of a MEMS film have important effects on the performance of related devices. An electrostatically actuated in-situ measuring method for average stress gradient and equivalent elastic modulus of the film is proposed based on pull-in voltages of a set of cantilevers. The key of the measuring method is to realize rapid and accurate calculation of pull-in voltages of the cantilever. To increase the accuracy of the measurement, bending of the cantilever along the width direction due to the stress gradient has been considered, and the method to implement perfect fixed boundary conditions of the cantilever are also taken into account. Actual simulations indicate that the calculating speed and the accuracy of the measuring method are ideal, and the method can apply to in-situ measurement.更多还原