【摘要】 针对微纳测量领域的需要,设计了一种三维微触觉MEMS传感器.为了标定该传感器的性能参数,提出了以高精度纳米测量机(NMM)为核心的测试校准方法;加工了NMM测头模块;制作了压阻信号调理和采集电路;搭建了测试校准系统.该系统具有移动范围大,精度高,更换方便,易于控制和记录数据等特点.利用它对传感器在Z轴方向的输出作校准,结果证实校准曲线线性良好,传感器在三个方向上耦合很小,其Z方向测量分辨力能够达到30nm,迟滞性小于±0.05%.更多还原

【Abstract】 In order to satisfy the requirements of micro-nano measuring field, a three-dimensional micro tactile MEMS sensor has been designed. For calibrating the performance parameters of this sensor, this paper puts forward a testing and calibration method based on high precision nanomeasuring machine(NMM), processes the head of NMM, makes the signal conditioning and acquisition circuit and builds the testing and calibration system. The system’s characteristics are large motion range, high precision, convenient replacing, easy controlling and noting data, etc. Using it to calibrate the output of the sensor in Z direction, the experiment results prove that the calibration curve has good linearity and the coupling of three directions is very small. The resolution in Z direction can reach 30 nm and hysteresis is less than ±0.05%.更多还原