【摘要】 通过对利用原子力显微镜(AFM)阳极诱导氧化作用下在硅表面生成纳米氧化结构的特征的讨论,发现通过改变加工时的偏置电压和脉冲宽度,氧化点高度和宽度与所施加偏置电压呈对数关系,氧化点高度与宽度与脉冲宽度呈指数关系;同时发现在环境温度和氧气浓度保持不变的条件下通过改变加工中的相对大气湿度,氧化点结构的高度和宽度随相对湿度的增加而增加.文中对该现象进行了讨论,并对加工条件进行了优化.更多还原

【Abstract】 The characteristics of nanometer scale silicon oxide’s structures, fabricated by conductive Atomic Force Microscope (AFM)’s tip induced anodic oxidation, are discussed. The logarithmic relations between the height/width of the oxides and the bias voltages, and the exponential relations between the height/width of the oxides and pulse durations are found by changing the voltage and pulse duration of nano-oxidation. At the same time, the effect of humidity on the height and width of nano-oxidation structures is studied at various relative humidities by keeping the oxygen concentration and temperature the same. The results indicate that the height/width of the oxides increase with the increase of the ambient humidity. The phenomena mentioned above are discussed and the fabrication conditions are optimized.更多还原