【摘要】 针对横向振动MEMS微谐振器,计入非线性空气阻尼力,对微谐振器非线性动力学特性进行研究。建立微谐振器非线性动力学模型,计入滑移边界条件和稀薄气体效应,利用FLUENT和MATLAB对Navier-Stokes方程和动力学方程进行求解。经过与国外实验对比,可得出考虑非线性阻尼力的平板振幅值非常接近实验值,振幅峰-峰值误差仅为6%,且优于线性动力学的分析结果。为MEMS器件非线性动力学特性分析提供理论依据。更多还原

【Abstract】 The nonlinear dynamic character analysis, which is considered nonlinear air damping force, about lateral micro-resonator is studied. Linear and nonlinear studies on viscous air damping force in laterally oscillating micro-comb structures are discussed. A new fluid-solid coupled model which is including slip effect and gas rarefaction effect is established in order to solve the numerical value. The nonlinear numerical simulation results, which base on Navier-Stokes equation and dynamical equation, demonstrate that damping force is a vital factor in micro-comb structures. Compared with experimental result, the nonlinear numerical value is quite approximate to it. The percentage error of the amplitudes (peak to peak) is about 6%. Nonlinear numerical value is more exact than linear value and the new method can be applied in other MEMS structures to simulate the dynamic performance.更多还原