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自确认压力传感器结构设计
Structure Design of Self-Validating Pressure Sensor
【摘要】 自确认传感器能够实现传感器故障的自诊断和自恢复,除了提供被测量的确认的测量值之外,还提供测量值的不确定度、测量值的状态等表征传感器输出可信度的参数,可以实时了解传感器的工作状态,及时采取相应的措施,大大提高监测系统的可靠性。本文针对自确认圆平膜片应变式压力传感器的设计,分析了圆平膜片的应力和应变分布,建立了圆平膜片上两种传统布片方式的数学模型,在分析圆平膜片压力传感器故障模式的基础上,对传统的布片方式进行了改进,建立了在圆平膜片上进行多组布片的方案,为实现自确认圆平膜片应变式压力传感器提供了坚实的基础。
【Abstract】 Self-validating (SEVA) sensor has the ability of self-diagnostics and self-reconstruction, it provides not only the validated measurement value, but also the validated uncertainty and measurement value status, which represent the credibility of sensor’s output. By using self-validating sensor, we can get the work condition of the sensor and take proper action in real time. This paper describes the structure design of self-validating circular-flat diaphragm strain gauge pressure sensor. The mathematical model of two traditional displacement of strain gauge on the circular-flat diaphragm was established by analyzing the stress and strain distribution of the circular-flat diaphragm, based on this and the fault mode analysis of the strain gauge pressure sensor, the traditional displacement was improved and a multi-displacement of strain gauges on the circular-flat diaphragm was established, which provides a stable basis for the implementation of self-validating circular-flat diaphragm strain gauge pressure sensor.
【Key words】 self-validating sensor; circular-flat diaphragm; stress distribution; displacement of strain gauge; fault mode;
- 【文献出处】 传感技术学报 ,Chinese Journal of Sensors and Actuators , 编辑部邮箱 ,2006年03期
- 【分类号】TP212
- 【被引频次】16
- 【下载频次】312