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自确认压力传感器结构设计

Structure Design of Self-Validating Pressure Sensor

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【作者】 冯志刚王祁信太克规

【Author】 FENG Zhi-gang, WANG Qi, SHIDA Katsunori (Department of Automation Measurement and Control Engineering, Haerbin Institute of Technology,Harbin 150001,China)

【机构】 哈尔滨工业大学自动化测试与控制系哈尔滨工业大学自动化测试与控制系 哈尔滨150001哈尔滨150001

【摘要】 自确认传感器能够实现传感器故障的自诊断和自恢复,除了提供被测量的确认的测量值之外,还提供测量值的不确定度、测量值的状态等表征传感器输出可信度的参数,可以实时了解传感器的工作状态,及时采取相应的措施,大大提高监测系统的可靠性。本文针对自确认圆平膜片应变式压力传感器的设计,分析了圆平膜片的应力和应变分布,建立了圆平膜片上两种传统布片方式的数学模型,在分析圆平膜片压力传感器故障模式的基础上,对传统的布片方式进行了改进,建立了在圆平膜片上进行多组布片的方案,为实现自确认圆平膜片应变式压力传感器提供了坚实的基础。

【Abstract】 Self-validating (SEVA) sensor has the ability of self-diagnostics and self-reconstruction, it provides not only the validated measurement value, but also the validated uncertainty and measurement value status, which represent the credibility of sensor’s output. By using self-validating sensor, we can get the work condition of the sensor and take proper action in real time. This paper describes the structure design of self-validating circular-flat diaphragm strain gauge pressure sensor. The mathematical model of two traditional displacement of strain gauge on the circular-flat diaphragm was established by analyzing the stress and strain distribution of the circular-flat diaphragm, based on this and the fault mode analysis of the strain gauge pressure sensor, the traditional displacement was improved and a multi-displacement of strain gauges on the circular-flat diaphragm was established, which provides a stable basis for the implementation of self-validating circular-flat diaphragm strain gauge pressure sensor.

【基金】 国家自然科学基金项目资助“自确认压力传感器的研究”(60572010)
  • 【文献出处】 传感技术学报 ,Chinese Journal of Sensors and Actuators , 编辑部邮箱 ,2006年03期
  • 【分类号】TP212
  • 【被引频次】16
  • 【下载频次】312
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