【摘要】 设计了一种新结构垂直腔面发射激光器(VCSEL),即采用环形分布孔结构取代以往的环形沟槽结构。由于环形分布孔间形成多个桥,为电注入提供了天然的桥状通道,很好的解决了电极过沟断线问题。并且器件表现了很好的输出特性,这种新结构器件的输出功率约为以往结构器件的1.34倍。更多还原

【Abstract】 A new structure design for VCSEL is reported using perforated ring instead of ring trench.Because perforated ring offers bridges for current injection,the connecting Ti-Au metal between ohmic contact and bonding pad does not have to cross the ring trench,and it would not cause the connecting metal to be broken.In addition,these VCSELs show good output characteristics.The VCSELs with perforated ring have a light output power of 0.34 time higher than those with ring trench.更多还原