【摘要】 通过对波长808nm的GaAIAs／GaAs半导体功率放大激光器端面镀ZrO2减反射膜工艺过程,从理论和实验上分析了涂层特性,透射率由无膜时的69％和32．6％提高到镀膜后的90％和80％以上,提高器件的耦合效率、输出光功率和工作寿命。更多还原

【Abstract】 The properties of coatings are analyzed theoretically and experimentally throughout the deposition process of ZrO2 antireflection films on facets of GaAlAs/ GaAs laser with semiconductor power amplification for the wavelength of 808 nm . The transmissivities of cavity faces are increased from 69 % and 32. 6% without coatings to above 90% and 80% with coatings . The coupling efficiency of device , output power of laser and operating lifetime are improved.更多还原