【摘要】 研究、设计了一种柔性压电式微定位机构。此机构采用压电陶瓷作为微位移驱动器,柔性铰链为导向机构,对丝杠螺母传动的精密机床工作台的运动位置进行自动补偿,实现了超精密定位。文中对柔性铰链机构进行了合理的设计及参数分析,并应用于精密机床中进行定位精度测试。实测结果表明,采用柔性压电式微位移机对精密机床工作台二次精定位,可使工作台定位精度提高到0.01μm,可满足精密、超精密加工需要。更多还原

【Abstract】 A flexible micro-displacement mechanism driven by piezoelectric actuator is researched and deigned in this paper.Adopting PZT as the micro-displacement driver and a kind of flexible joint as the guiding device,it compensates moving position of ball feed machine tools automatically and realizes the second precise orientation.Reasonable design and analysis were done to flexible joint,and position accuracy test is also done for the further.Experiment result indicates that the positioning accuracy is up to 0.01um with the second precise orientation of micro-displacement mechanism,which meets the needs of super-precise manufacture.更多还原