【摘要】 综述了迄今为止各种分析低温等离子体放电物理过程的数值模型,以帮助我们从数值模型出发理解许多至今仍无法解释的现象,同时也为低温等离子体在等离子体处理技术、气体激光等工业应用以及在微电子、材料制备、环保、航空航天、军事等领域的应用提供了研究方法.更多还原

【Abstract】 The review of various kinds of numerical modeling of low-pressure plasma discharge helps us understand many unexplainable phenomena based on numerical modeling.Meanwhile,it also provides research methods of low-pressure plasma in industrial applications,such as plasma processing,gas laser and so on,and applications in micro-electronic,material preparation,environmental protection,aerospace industry and military,etc.更多还原