【摘要】 综述了各种沉积条件对磁控溅射技术生长氮化铝薄膜的微观结构,电学以及光学性能的影响。采用磁控溅射技术,可以选用在适当的条件下制备具有特定功能与结构优良的氮化铝薄膜。更多还原

【Abstract】 Reviewed were the effects of various deposition conditions on microstructural,electrical and optical properties of AlN films grown by magnetron sputtering deposition technology.AlN films with special function and excellent structure can be grown under proper conditions by magnetron sputtering.更多还原