【摘要】 研究了电子束蒸发法制备的氧化镁薄膜在退火处理过程中特性的变化.研究表明:退火处理改善了薄膜的结晶性,降低了红外光谱中水分子吸收峰的强度,并使得低温或低通氧气量制备的氧化镁薄膜的可见光透射比下降,且这些薄膜在退火处理中极易产生裂纹.薄膜的结晶取向或结晶性是薄膜可见光谱变化和表面裂纹产生的主要原因,薄膜表面光洁度对可见光谱变化影响不大.更多还原

【Abstract】 Characteristics of MgO films prepared by e-beam evaporation as a function of the annealing process are studied.The results show that,after the annealing process,the crystallinity of MgO films is improved,and the peak intensity in IR spectrum corresponding to water content is decreased.However,the visible transmission is decreased and cracks are easily produced on the surface for MgO films prepared at low temperature or low oxygen flux.The preferred orientation or the crystallinity plays an important role in controlling the visible spectrum and surface features of the deposited MgO films,and the visible spectrum is almost independent of the surface roughness of the films.更多还原