【摘要】 在微小型特别是硅谐振微传感器中,低信噪比的微弱信号检测、闭环自激电路的小型化和抗干扰等问题十分突出.复合音叉微小型谐振式压力传感器数字锁相环闭环检测系统将输入的模拟信号(压力)直接转换为准数字量(频率),测量精度高,基本上解决了测量系统中结构参数小、工作频率高、信号幅度弱、耦合强、干扰大等问题,该方法可直接应用于硅谐振式微传感器,对实现硅谐振微传感器的工程化具有指导意义.更多还原

【Abstract】 In the application of small sensor and micro-sensor,especially silicon resonant micro-sensor,the detection of weak signals with low SNR(signal noise ratio),the miniaturization and the anti-jamming problems of the self-oscillation closed-loop system are quite outstanding.Digital PLL(phase locked loops) closed loop measurement system of the compound tuning fork resonant pressure sensor directly transforms input analog signals(pressure) into the semi-digital signals(frequency) with high precision,which has basically solved the problems of the measurement system such as micro structure parameters,high work frequency and weak amplitude,strong coupling and big disturbance of the effective signals etc.The method can be applied to the silicon resonant micro-sensor directly,which is significant and directive for the application of silicon resonant microsensors.更多还原