【摘要】 计算机光学元件基于光波衍射理论,通过在片基上刻蚀产生两个或多个台阶深度的浮雕结构,形成纯相位并同轴再现,使其具有极高的衍射效率。其分析方法包括几何理论法、标量衍射理论法和矢量理论法。其制作根据元件表面的相位分布函数,反推出相位分布,再按照相位分布等级N,制作n个二元振幅型掩模版,最后进行光刻和离子束刻蚀。更多还原

【Abstract】 Computer optical element based on light-wave diffraction theory is through that etches on film base to produce relievo structure with two or multiple sidestep depths, and form pure phase and coaxial recurrence, so it has higher diffraction efficiency. Analyzing method includes geometry theory, scalar diffraction theory and vector diffraction theory etc methods. Machining procedures: reduced phase distributing according to phase distributing functions of element surface, N piece of duality swing mask plate were machined according to the level of phase distributing. Finally, photo etching and ion beam etching was put up.更多还原