【摘要】 提出一种新型压力传感器自检测方法———相变热驱动法.在压力传感器的密封腔中填充相变物质,利用相变物质气化后所产生的巨大压力实现自检测功能.通过控制压力腔中相变物质的填充量与加热电阻的加热功率,可以实现不同量程压力传感器的自检测.基于相变热驱动法研制了一种单晶硅大量程自检测压力传感器,传感器为硅-玻璃-硅三层结构,通过静电键合与热键合技术制备.测试结果显示,自检测电压输出为满量程输出的6·8%,综合精度高于2·1‰.更多还原

【Abstract】 A novel self-testable method, thermo-pneumatic actuation,which is based on phase change,is presented.It can be used in large-scale self-testable pressure sensors.The phase change material (PCM) fills the cavity of the sensor.Applying voltage to the heating resistor,the PCM will be brought to boil.The vapor inside the cavity of the pressure sensor produces a significant pressure on the diaphragm,so a self-test is implemented by means of a thermal actuator based on the phase change.By the magnitude of the PCM that fills the cavity and the power of the heating resistor,the self-testing of the pressure sensors with different measurement range can be achieved.Based on this principle,a novel large-scale self-testable pressure sensor is fabricated.The sensor is built in a silicon-glass-silicon sandwich structure by anodic bonding.The self-testing output of the sensor is 6.8% of the full-scale output,and the accuracy is 2.1‰.更多还原