【摘要】 报道了一种由悬浮在玻璃衬底上的表面镀铜平面单晶硅螺线构成的新型MEMS电感,可消除衬底损耗及减小电阻损耗.采用一种硅玻璃键合深刻蚀成型释放工艺并结合无电镀技术制作该电感,形成厚约40μm的硅螺线,在硅螺线表面镀有高保形厚铜镀层,在铜镀层表面镀有起钝化保护作用的薄镍镀层.该电感的自谐振频率超过15GHz,在11.3GHz下,品质因子达到约40,电感值超过5nH.基于该电感的简化等效电路模型,采用一种特征函数法进行了参数提取,模拟结果与测量结果符合得很好.更多还原

【Abstract】 A novel MEMS inductor consisting of a planar single crystalline silicon spiral with a copper surface coating as the conductor is presented.Using a silicon-glass anodic bonding and deep etching formation-and-release process,a 40μm-thick silicon spiral is formed,which is suspended on a glass substrate to eliminate substrate loss.The surfaces of the silicon spiral are coated with highly conformal copper by electroless plating to reduce the resistive loss in the conductor,with thin nickel film plated on the surface of the copper layer for final surface passivation.The fabricated inductor exhibits a self-resonance frequency higher than 15GHz,with a quality factor of about 40 and an inductance of over 5nH at 11.3GHz.Simulations based on a compact equivalent circuit model of the inductor and parameter extraction using a characteristic-function approach are carried out,and good agreement with measurements is obtained.更多还原