【摘要】 针对微机电系统中电热微执行器和位移放大机构都具有柔性的事实,从理论上分析了作为负载系统的柔性位移放大机构对微执行器输出位移的影响,并用有限元方法对二者的工作性能进行了仿真.结果表明,电热微执行器外接负载的刚度和执行器本身刚度的比值是影响整个组合器件性能的重要因素.最后用深层反应离子刻蚀技术(DRIE)在硅隔离衬底(SOI)上加工了电热微执行器和柔性位移放大机构,并对其进行了测试,测试结果与有限元分析结果符合得很好.更多还原

【Abstract】 Due to the fact that micro-electromechanical systems (MEMS) based thermal microactuators and displacement amplification mechanisms are all compatible,the stiffness match between these two components is important to consider to achieve adequate output in the design phase.First,the effect of load stiffness on microactuators is theoretically analyzed.The finite element method (FEM) is then used to simulate the performance of both thermal actuators and compatible amplifiers.It is shown that the stiffness ratio between microactuators and compatible transmissions significantly influences the performance of the combined mechanism.Prototypes are fabricated on an SOI substrate with deep reaction ion etching (DRIE) technology and then are tested.Experimental results coincide well with the theoretical predictions.更多还原