【摘要】 研究了影响InSb抛光片表面的粗糙度的因素,通过实验数据及理论分析,用化学机械抛光的方法有效的降低了InSb抛光片表面的粗糙度。更多还原

【Abstract】 The factors of impacting InSb crystal surface roughness were researched. Through theoretical and experimental data analysis,was reduced effectively by chemical mechanical polishing methods the surface roughness of the InSb wafers.更多还原